Design of a 200 kV Focused Ion Beam Surface Analysis System

  title={Design of a 200 kV Focused Ion Beam Surface Analysis System},
  author={Ryou Mimura and Hiroshi Sawaragi and Ryuso Aihara and Mikio Takai},
  • Ryou Mimura, Hiroshi Sawaragi, +1 author Mikio Takai
  • Published 1992
  • Physics
  • A nanometer nondestructive three-dimensional Rutherford back scattering (RBS) and medium energy ion scattering (MEIS) analysis system with a compact 200 kV focused ion beam (FIB) column has been designed. A high-vacuum sample chamber with a six-axis goniometer and an electrostatic toroidal analyzer for channeling and RBS analysis are connected to the acceleration column. A minimum beam spot size of less than 50 nm with a current of 50 pA is estimated by calculation for a 400 keV Be++ ion beam… CONTINUE READING

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