Design of Piezoelectric Actuators Using the Topology Optimization Based on Density Method

Abstract

Flextensional Piezoelectric Actuator consists of a flexible structure actuated by piezoelectric ceramics. These actuators are applied to microelectromechanical systems (MEMS), nanotechnology equipment, microsurgery equipment, etc. However, due to the fact these actuators essentially consist of a compliant mechanism their design is complex. The compliant… (More)

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