Design of MEMS Low Range Accelerometer


a new MEMS accelerometer with low range is designed based on traditional bilateral four Beam micro accelerometer, measuring range is ±10g. Using the ANSYS finite element software to model the accelerometer structure firstly, and then to analysis stress¿modal and impact ability¿The theoretical sensitivity of the accelerometer reaches 1.029mV/g when the supply voltage is 5V, compared to the traditional structure, it greatly improves low range accelerometer’s sensitivity.

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@article{Tao2011DesignOM, title={Design of MEMS Low Range Accelerometer}, author={Guo Tao and Xiang Ting and Fei Qingguo}, journal={2011 Third International Conference on Measuring Technology and Mechatronics Automation}, year={2011}, volume={1}, pages={982-985} }