The design and analysis of micro-structure on high-overload accelerometer”[J
- Wang Wei, Chen Lijie, Ben Qing Ling, Shaoxian Hui, Chen Xin
- Measurement and Testing Technology
a new MEMS accelerometer with low range is designed based on traditional bilateral four Beam micro accelerometer, measuring range is ±10g. Using the ANSYS finite element software to model the accelerometer structure firstly, and then to analysis stress¿modal and impact ability¿The theoretical sensitivity of the accelerometer reaches 1.029mV/g when the supply voltage is 5V, compared to the traditional structure, it greatly improves low range accelerometer’s sensitivity.