Design improvements for an electret-based MEMS vibrational electrostatic energy harvester

@inproceedings{Altena2013DesignIF,
  title={Design improvements for an electret-based MEMS vibrational electrostatic energy harvester},
  author={Geert Altena and M. Renaud and Ren{\'e} Elfrink and Martijn Goedbloed and C. de Nooijer and Rob van Schaijk},
  year={2013}
}
This paper presents several improvements to the design of an electret-based MEMS vibrational electrostatic energy harvester that have led to a two orders of magnitude increase in power compared to a previously presented device. The device in this paper has a footprint of approximately 1 cm2 and generated 175 μW. The following two improvements to the design are discussed: the electrical connection principle of the harvester and the electrode geometrical configuration. The measured performance of… CONTINUE READING