Design for manufacturability in submicron domain

@article{Maly1996DesignFM,
  title={Design for manufacturability in submicron domain},
  author={Wojciech Maly and Hans T. Heineken and Jitendra Khare and Pranab K. Nag},
  journal={Proceedings of International Conference on Computer Aided Design},
  year={1996},
  pages={690-697}
}
Key characteristics of newly emerging IC technologies render the traditional concept of die size minimization and traditional "design rules" insufficient to handle the design-manufacturing interface. This tutorial surveys the design and process characteristics relevant to the manufacturability of submicron ICs. The discussion also covers analysis of design for manufacturability (DFM) trade-offs. Yield and cost models needed to analyze these trade-offs are explained as well. 
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