Design considerations for vacuum systems with built-in getter ion and sublimation pumps

@inproceedings{Zaphiropoulos1967DesignCF,
  title={Design considerations for vacuum systems with built-in getter ion and sublimation pumps},
  author={Renn Zaphiropoulos and D. De Taddeo},
  year={1967}
}
A comparative design analysis is made for vacuum systems using diffusion pumps and getter ion pump. The important elements in any vacuum system are the work chamber and the pumping means. The features of “parallel” and “series” pumping are compared. Different methods are discussed and illustrated for achieving “parallel” pumping on a work chamber by using cryopumps, sublimation pumps, mechanical pumps, and getter ion pump. The advantages of different configurations are described and… CONTINUE READING