Design and study of piezoresistive polycrystalline silicon sensor

  • Ye Li, Ping Zhang
  • Published 2010 in
    2010 International Conference on Future…

Abstract

Piezoresistive polycrystalline silicon sensor has the advantages of high sensitivity and nice stability as well as not hard to manufacture, so it is suitable for measuring the ultra-micro pressure. The mature polycrystalline silicon is adopted as sensitive material for the sensor in this paper. Two island-beam structure is used as the chip; stress… (More)

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