Design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches

@article{Afrang2004DesignAS,
  title={Design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches},
  author={Saeid Afrang and Ghader Rezazadeh},
  journal={2004 IEEE International Conference on Semiconductor Electronics},
  year={2004},
  pages={4 pp.-}
}
This paper reports on the design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches. First the electromechanical design and simulation of simple cantilever and fixed-fixed ends type MEMS switches is presented, and the effect of electrostatic area and its location on the switching voltage is investigated. Then the… CONTINUE READING