Design and simulation of humidity micro-sensors structure based on Polymers

@article{Suchnek2006DesignAS,
  title={Design and simulation of humidity micro-sensors structure based on Polymers},
  author={Petr Such{\'a}nek and Miroslav Husak},
  journal={2006 International Conference on Advanced Semiconductor Devices and Microsystems},
  year={2006},
  pages={189-192}
}
The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezoresistive simulation in CoventorWare. Acquired simulation data gets a primary image about sizes bend and surface strain on microcantilever which forms sensing part of sensor