Design and performance of a scanning ptychography microscope.

Abstract

We have designed and constructed a dedicated instrument to perform ptychography measurements and characterization of multilayer Laue lenses nanofocusing optics. The design of the scanning microscope provides stability of components and minimal thermal drifts, requirements for nanometer scale spatial resolution measurements. We performed thorough laboratory… (More)
DOI: 10.1063/1.4868968

Topics

  • Presentations referencing similar topics