Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure

@article{Wu2017DesignAO,
  title={Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure},
  author={Zeyi Wu and Qingsong Xu},
  journal={2017 2nd International Conference on Advanced Robotics and Mechatronics (ICARM)},
  year={2017},
  pages={558-563}
}
This paper introduces the design and optimization of a new piezo-driven compact XY parallel stage for micro/nano-positioning applications. The compact parallel stage is developed with a stacked design. A displacement amplifier is adopted to amplify the stroke of piezo actuator. The amplifier is then improved and integrated with the decoupler to isolate the… CONTINUE READING