Design and modeling of an electromagnetically excited silicon nitride beam resonant pressure sensor

Abstract

An electromagnetically excited silicon nitride beam resonant pressure sensor is described and numerical modeling is carried out on the analysis of the sensitivity of pressure measurement and temperature drift. The proposed approach is based on measurement of resonant frequencies for two resonant beams located on a diaphragm inducing different axial stress… (More)
DOI: 10.1109/NEMS.2009.5068688

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@article{Chen2009DesignAM, title={Design and modeling of an electromagnetically excited silicon nitride beam resonant pressure sensor}, author={Deyong Chen and Zhengwei Wu and Xiaojing Shi and Junbo Wang and Lei Liu}, journal={2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems}, year={2009}, pages={754-757} }