Design and implementation of liquid droplet based motion sensing

@article{Zeng2009DesignAI,
  title={Design and implementation of liquid droplet based motion sensing},
  author={Hansong Zeng and Yi Zhao},
  journal={TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2009},
  pages={680-683}
}
This paper reports a liquid droplet based motion sensing system with advantages of simple fabrication, superior biocompatibility and binary signals. The sensor consists of a dielectric substrate and an array of microelectrodes patterned by surface micromachining techniques. In this sensing system, an ionic droplet behaves as the proof mass which responses… CONTINUE READING