Design and implementation of a micron-sized electron column fabricated by focused ion beam milling.

  title={Design and implementation of a micron-sized electron column fabricated by focused ion beam milling.},
  author={Flavio Wicki and Jean-Nicolas Longchamp and Conrad Escher and Hans-Werner Fink},
We have designed, fabricated and tested a micron-sized electron column with an overall length of about 700 microns comprising two electron lenses; a micro-lens with a minimal bore of 1 micron followed by a second lens with a bore of up to 50 microns in diameter to shape a coherent low-energy electron wave front. The design criteria follow the notion of scaling down source size, lens-dimensions and kinetic electron energy for minimizing spherical aberrations to ensure a parallel coherent… Expand
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