Design and fabrication of micromachined LPD-based SnO2 gas sensor integrated TaN with micro-hotplate

@article{Chiou2012DesignAF,
  title={Design and fabrication of micromachined LPD-based SnO2 gas sensor integrated TaN with micro-hotplate},
  author={Jin-Chern Chiou and Chia-Yang Lin and Shang-Wei Tsai and Wei-Che Hong},
  journal={2012 IEEE Sensors},
  year={2012},
  pages={1-4}
}
In this study, the design and fabrication of a micromachined LPD-based SnO2 gas sensor integrated with TaN micro-hotplate was carried out by utilizing MEMS technology. In the characteristics of the micro-heater, thermal response, thermal distribution and power consumption of heated TaN micro-heater were measured by FLIR systems. For the sensing characterization, the sensing responses of LPD-based SnO2 gas sensor with TaN micro-heater to H2S gas were measured in different operating temperatures… CONTINUE READING