Design and fabrication of electro-thermally activated micro gripper with large tip opening and holding force

Abstract

This paper reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven jointly by a new metallic V-shape actuator (VSA), and a set of modified Guckel U-shape actuators (mUSA). The modification of the angle between the hot and cold arms in the mUSA facilitates desired unidirectional in-plane displacement… (More)

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Cite this paper

@article{Khazaai2011DesignAF, title={Design and fabrication of electro-thermally activated micro gripper with large tip opening and holding force}, author={J. Khazaai and Hongwei Qu and Meir Shillor and Lorenzo Smith}, journal={2011 IEEE SENSORS Proceedings}, year={2011}, pages={1445-1448} }