Design and fabrication of an electrostatically actuated MEMS probe card

@article{Shingo2003DesignAF,
  title={Design and fabrication of an electrostatically actuated MEMS probe card},
  author={Kakimoto Shingo and Kyoko S. Kataoka and Toshihiro Itoh and Tadatomo Suga},
  journal={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)},
  year={2003},
  volume={2},
  pages={1522-1525 vol.2}
}
We have designed and fabricated a new type of MEMS probe card consisting of electrostatically-driven microprobes, which can be used for a next generation wafer probe card with the fritting-contact method. MEMS probe cards are requisite to higher pad-density and smaller pad-pitch chips, and are effective in high frequency testing. If a probe card consists of an array of actuator-integrated microprobes, it has some further advantages. Since the deflection of each probe can individually be… CONTINUE READING

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