Design and fabrication of a single membrane push-pull SPDT RF MEMS switch operated by electromagnetic actuation and electrostatic hold

@inproceedings{Cho2010DesignAF,
  title={Design and fabrication of a single membrane push-pull SPDT RF MEMS switch operated by electromagnetic actuation and electrostatic hold},
  author={I Cho and Euisik Yoon},
  year={2010}
}
In this paper, we report a new push-pull-type SPDT (single pole double throw) switch actuated by the combination of electromagnetic and electrostatic forces for low power and low voltage operation. The switch is initially actuated by large electromagnetic force to change its state and is held to maintain its state by applying electrostatic force to reduce static power consumption. The electromagnetic force can be easily generated at low voltage. The maximum actuation voltage is below 4.3 V and… CONTINUE READING
Highly Cited
This paper has 17 citations. REVIEW CITATIONS

Citations

Publications citing this paper.
Showing 1-10 of 12 extracted citations

References

Publications referenced by this paper.
Showing 1-10 of 29 references

Electromagnetic actuation and microchannel engineering of a polymer micropen array integrated with microchannels and sample resevoirs for biological assay patterning

  • M Im, I Cho, K Yun, E Yoon
  • Appl. Phys. Lett
  • 2007
1 Excerpt

Electromagnetic actuation and microchannel engineering of a polymer micropen array integrated with microchannels and sample resevoirs for biological assay patterning Appl

  • M Im, I Cho, K Yun, E Yoon
  • Phys . Lett .
  • 2007

A single-pole double-throw (SPDT) circuit using lateral metal-contact micromachined switches

  • M Tang, A Liu, A Agarwal, Z Liu, C Lu
  • Sensors Actuators A
  • 2005
1 Excerpt

Single - poledoublethrow switch based on toggle switch Electron

  • B Schauwecker, K Strohm, T Mack, W Simon, J Luy
  • Lett .
  • 2003

Single-pole-double-throw switch based on toggle switch

  • B Schauwecker, K Strohm, T Mack, W Simon, J Luy
  • Electron. Lett
  • 2003
2 Excerpts

Similar Papers

Loading similar papers…