Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluids

@article{Beutel2012DesignAE,
  title={Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluids},
  author={T. Beutel and M. Leester-Sch{\"a}del and Stephanus Buettgenbach},
  journal={Microsystem Technologies},
  year={2012},
  volume={18},
  pages={893-903}
}
In this work, the latest results of the design, fabrication and characterization of a new MEMS piezoresistive pressure sensor are presented. Significant changes in the layout as well as in the micro-fabrication process have been made, e.g. anodic bonding of a glass cover on the backside. The sensor has been developed in order to meet the special requirements of measurements in fluid mechanics, particularly with regard to the non-intrusive nature of the sensor. The sensor development, starting… CONTINUE READING

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