Design and development of an interferometer with improved angular tolerance and its application to x–y theta measurement

@inproceedings{Menq2000DesignAD,
  title={Design and development of an interferometer with improved angular tolerance and its application to x–y theta measurement},
  author={Chia-Hsiang Menq and Jihua Zhang and Jian Shi},
  year={2000}
}
Plane mirror interferometers are widely used in the measurement of x–y motions. Although large range planar motion can be measured, it suffers from very tight angular tolerance. In this article an interferometer system having improved angular range and linear resolution is developed. In the system, a tilted laser beam is incident to a plane mirror attached to a moving stage and an additional retroreflector and a plane mirror are placed off the stage to help return the measuring beam. In such a… CONTINUE READING

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