Design and development of a MEMS-IDT gyroscope

  title={Design and development of a MEMS-IDT gyroscope},
  author={Vijay K. Varadan and Wonhee Suh and Pascal Xavier and Kachapilly Arun Jose and Vasundara V. Varadan},
The design, development and performance evaluation of a novel radio frequency microelectromechanical systems (MEMS) gyroscope, based on a surface acoustic wave resonator (SAWR) and a surface acoustic wave sensor is presented in this paper. Most of the MEMS gyroscopes based on silicon vibratory structures that utilize the energy transfer between the two vibratory modes demand small fabrication tolerances to minimize signal output when there is no rotation (i.e. zero rate output). This 1 cm × 1… CONTINUE READING
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A surface acoustic wave gyro sensor

  • M Kurosawa
  • Int. Conf. Solid-State Sensors and Actuators…
  • 1997
1 Excerpt

Design of SAW delay lines for sensors

  • W Soluch
  • 11th Eur. Conf. on Solid State Transducers…
  • 1997

Laterally self-oscillated and forced-balanced micro vibratory gyroscope packaged in vacuum package with a conditioning ASIC

  • K YPark
  • Proc. SPIE
  • 1997

Wireless passive IDT strain microsensor

  • V VVaradan, V KVaradan, X Bao, S Ramanathan, D Piscotty
  • Smart Mater. Struct
  • 1997
1 Excerpt

Micromachined dual input axis angular rate sensor Tech. Digest Solid-State Sensor and Actuator Workshop (Hilton

  • T Juneau, A PPisano
  • 1996

A micromachined vibrating gyroscope Sensors Actuators A

  • K Tanaka
  • 1995

A micromachined vibrating ring gyroscope Tech. Digest Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC

  • M PPutty, K Najafi
  • 1994

Gyroscopic effect in surface acoustic waves

  • B YLao
  • IEEE Ultrasonics Symp
  • 1980
1 Excerpt

The analyses of grating structures by coupling-of-modes theory

  • H Haus, P VWright
  • IEEE Utrasonics Symp
  • 1980
1 Excerpt

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