Design and development of a MEMS-IDT gyroscope

@inproceedings{Varadan2000DesignAD,
  title={Design and development of a MEMS-IDT gyroscope},
  author={Vijay K. Varadan and Wonhee Suh and Pascal Xavier and Kachapilly Arun Jose and Vasundara V. Varadan},
  year={2000}
}
The design, development and performance evaluation of a novel radio frequency microelectromechanical systems (MEMS) gyroscope, based on a surface acoustic wave resonator (SAWR) and a surface acoustic wave sensor is presented in this paper. Most of the MEMS gyroscopes based on silicon vibratory structures that utilize the energy transfer between the two vibratory modes demand small fabrication tolerances to minimize signal output when there is no rotation (i.e. zero rate output). This 1 cm × 1… CONTINUE READING
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