Design and demonstration of micro multi-step mirrors and light source in micro FTIR

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@article{Liang2011DesignAD, title={Design and demonstration of micro multi-step mirrors and light source in micro FTIR}, author={Zhongzhu Liang and Jianguo Fu and Cong Feng and Jingqiu Liang}, journal={2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems}, year={2011}, pages={433-436} }