Design and demonstration of micro multi-step mirrors and light source in micro FTIR

Abstract

To obtain high resolution, high signal-to-noise ratio (SNR), high reliability and real time in wide spectral range, we study the space modulation Micro Fourier Transform Spectrometer (μFTS) based on multi-step mirrors covering the spectral range of 3–5µm and 8–12 µm in theory and experiment. The influences of spectrum… (More)
DOI: 10.1109/NEMS.2011.6017385

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Cite this paper

@article{Liang2011DesignAD, title={Design and demonstration of micro multi-step mirrors and light source in micro FTIR}, author={Zhongzhu Liang and Jianguo Fu and Cong Feng and Jingqiu Liang}, journal={2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems}, year={2011}, pages={433-436} }