Design and control of six degree-of-freedom active vibration isolation table.

@article{Hong2010DesignAC,
  title={Design and control of six degree-of-freedom active vibration isolation table.},
  author={Jinpyo Hong and Kyihwan Park},
  journal={The Review of scientific instruments},
  year={2010},
  volume={81 3},
  pages={035106}
}
A six-axis active vibration isolation system (AVIS) is designed by using the direct driven guide and ball contact mechanisms in order to have no cross-coupling between actuators. The point contact configuration gives an advantage of having an easy assembly of eight voice coil actuators to an upper and a base plate. A voice coil actuator is used since it can provide a large displacement and sufficient bandwidth required for vibration control. The AVIS is controlled considering the effect of… CONTINUE READING

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