Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot

@inproceedings{Beyeler2008DesignAC,
  title={Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot},
  author={Felix Beyeler and Simon Muntwyler and Zolt{\'a}n Nagy and Chauncey F. Graetzel and Matthias Moser and Bradley J. Nelson},
  year={2008}
}
This paper presents the design, fabrication and calibration of a multi-axis micro force–torque sensor. The sensor and its readout electronics are specifically designed to simultaneously measure two force components and one torque component. The load is measured by capacitive comb drives which provide high sensitivity. The sensor is applied to measure micro-Newton level forces and nano-Newton-meter level torques on a magnetically actuated microrobot. This microrobot is assembled from… CONTINUE READING

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