Design and analysis of compact ultra Energy-Efficient logic gates using laterally-actuated double-electrode NEMS


Nano-Electro-Mechanical Switches (NEMS) are among the most promising emerging devices due to their near-zero subthreshold-leakage currents. This paper reports device fabrication and modeling, as well as novel logic gate design using "laterally-actuated double-electrode NEMS" structures. The new device structure has several advantages over existing NEMS… (More)
DOI: 10.1145/1837274.1837498


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