Design and analysis of aspherical multilayer imaging x-ray microscope

  title={Design and analysis of aspherical multilayer imaging x-ray microscope},
  author={David L. Shealy and Wu Jiang and Richard B. Hoover},
Considerable effort has been devoted recently to the design, analysis, fabrication, and testing of spherical Schwarzschild microscopes for soft x-ray applications in microscopy and projection lithography. The spherical Schwarzschild microscope consists of two concentric spherical mirrors configured such that the third-order spherical aberration and coma are zero. Because multilayers are used on the mirror substrates for soft x-ray applications, it is desirable to have a small number of… CONTINUE READING


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