Design and Implementation of a Micromanipulation System Using a Magnetically Levitated MEMS Robot

  title={Design and Implementation of a Micromanipulation System Using a Magnetically Levitated MEMS Robot},
  author={Caglar Elbuken and M. B. Khamesee and Mustafa Yavuz},
  journal={IEEE/ASME Transactions on Mechatronics},
Magnetic levitation of microrobots is presented as a new technology for micromanipulation tasks. The microrobots were fabricated based on microelectromechanical systems technology and weigh less than 1 g. The robots can be positioned in 3-D using magnetic field. It is shown that microrobots can be produced using commercially available magnets or electrodeposited magnetic films. A photothermal microgripper is integrated to the microrobots to perform micromanipulation operations. The… CONTINUE READING
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