Design and Fabrication of Silicon Nanowire based Sensor

@inproceedings{Rahman2013DesignAF,
  title={Design and Fabrication of Silicon Nanowire based Sensor},
  author={Siti Fatimah Abd Rahman and Nor Azah Yusof and Uda Hashim and Mohammad Nuzaihan Md Nor},
  year={2013}
}
This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a starting material, the nanowires is fabricated using a top-down approach which involved Scanning Electron Microscope based Electron Beam Lithography method. The silicon nanowires are well developed with the smallest dimension is 65nm in width. The effect of line width and exposure… CONTINUE READING
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