Design and Fabrication of On-Chip Coupled Inductors Integrated With Magnetic Material for Voltage Regulators

@article{Morrow2011DesignAF,
  title={Design and Fabrication of On-Chip Coupled Inductors Integrated With Magnetic Material for Voltage Regulators},
  author={P R Morrow and Chang-Min Park and H W Koertzen and J. T. DiBene},
  journal={IEEE Transactions on Magnetics},
  year={2011},
  volume={47},
  pages={1678-1686}
}
On-chip strip-line coupled inductors integrated with magnetic material are a promising technology option to enable on-chip voltage regulators for improving power management in microelectronics. We report on design methodologies where several examples of parameter tradeoffs are presented. When considered with practical integration constraints, these result in an optimized structure. Strip-line inductors integrated with Ni80Fe20 were then fabricated, electrically characterized, and compared to… CONTINUE READING
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