Design and Fabrication of Microheaters for Localized Carbon Nanotube Growth

@article{Zhou2008DesignAF,
  title={Design and Fabrication of Microheaters for Localized Carbon Nanotube Growth},
  author={Ying Chang Zhou and Jamie L. Johnson and Lizhen Wu and Srinivasa Rao Maley and Aydemir G{\"u}ralp Ural and Huikai Xie},
  journal={2008 8th IEEE Conference on Nanotechnology},
  year={2008},
  pages={452-455}
}
This paper presents a reliable method for the growth of single-walled carbon nanotubes (SWNTs) at room temperature by using localized heating. A surface micromachining technique is used to create suspended microstructures for good thermal isolation. Pt resistors are integrated as the heating source, and the local growth temperature and electrical field can be controlled by the heater geometry and applied voltage. Growth of aligned nanotubes with diameters ranging from 1-10 nm has been… CONTINUE READING

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