Design and Fabrication of MEMS-Based Monolithic Fuel Cells

  title={Design and Fabrication of MEMS-Based Monolithic Fuel Cells},
  author={Nariaki Kuriyama and Tsuyoshi Kubota and Daryl Okamura and Toshiya Suzuki and Jun Sasahara},
  journal={TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference},
This paper describes the design, fabrication and performance of small fuel cells using micro electromechanical systems (MEMS) technology. The MEMS-based fuel cell consisted of three components layers, including those of an electromechanically integrated anode cathode, and polymer electrolyte membrane (PEM). We focused on carbon material. Carbon nanotube (CNT) was employed as electrically conductive material suitable for both gas diffusion and catalyst support layer. A prototype was successfully… CONTINUE READING
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A Silicon Microfuelcell with a Porous Silicon Nitride Membrane Electrode Assembly”, the Electrochemical Society Meeting Abstracts, 202nd Meeting, Abstract 708

  • S. H. Kravitz
  • Oct. 20-25,
  • 2002
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