Design and Fabrication of Glass-based Integrated Passive Devices

@article{Sun2018DesignAF,
  title={Design and Fabrication of Glass-based Integrated Passive Devices},
  author={Peng Sun and Yuhong Zhou and Ge Sima and Zhaoqiang Li and Liqiang Cao},
  journal={2018 19th International Conference on Electronic Packaging Technology (ICEPT)},
  year={2018},
  pages={59-63}
}
  • P. Sun, Yuhong Zhou, Liqiang Cao
  • Published 1 August 2018
  • Engineering
  • 2018 19th International Conference on Electronic Packaging Technology (ICEPT)
The integrated passive device technology is important to realize high performance, small volume, low cost ant multi-functional integration for wireless RF front-end applications. And glass substrate become more and more popular in passive device fabrication because of its low dielectric loss, high thermal stability, high resistivity, and adjustable Coefficient of Thermal Expansion. In this paper, we have designed and fabricated circular planar inductors and band-pass filter based on our unique… 
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