Design and Fabrication Issues in Affinity Cantilevers for bioMEMS Applications

  title={Design and Fabrication Issues in Affinity Cantilevers for bioMEMS Applications},
  author={N. S. Kale and V. V. R. Narasimha Rao},
  journal={Journal of Microelectromechanical Systems},
Microfabricated cantilevers are widely used for biomedical sensing applications. In this paper, for the first time, design guidelines have been provided for composite polymeric microcantilevers with embedded piezoresistors. Optimization guidelines have been provided from the point of reducing their stiffness and to increase their deflection and the DeltaR/R response. Choice of the piezoresistive material and the location of this layer with respect to the neutral axis are shown to impact the… CONTINUE READING
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