Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology

This paper presents a fully differential single-axis accelerometer fabricated using the MetalMUMPs process. The unique structural configuration and common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. CoventorWare is used in structural and electrical design and simulation of the… CONTINUE READING