Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity

@article{Chen2007DesignAC,
  title={Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity},
  author={Nannan Chen and Craig Tucker and J. Engel and Yingchen Yang and Saunvit Dinesh Pandya and Chang Liu},
  journal={Journal of Microelectromechanical Systems},
  year={2007},
  volume={16},
  pages={999-1014}
}
We report the development of an artificial hair cell (AHC) sensor with design inspired by biological hair cells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-mum tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor… CONTINUE READING
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