Design Analysis of MEMS Capacitive Differential Pressure Sensor for Aircraft Altimeter

@inproceedings{Eswaran2012DesignAO,
  title={Design Analysis of MEMS Capacitive Differential Pressure Sensor for Aircraft Altimeter},
  author={P. Eswaran and S. N. Malarvizhi},
  year={2012}
}
In this paper, an analytical and simulation solution for Microelectromechanical systems (MEMS) based capacitive differential pressure sensor for aircraft altimeter is proposed. The principle and design of the proposed MEMS capacitive differential pressure sensor design is explained. Centre deflection and capacitive sensitivity analysis is carried out for circular, square and rectangle diaphragm membrane. Numerical analysis and simulation on deflection and capacitive sensitivity is carried out… CONTINUE READING

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