Design , fabrication and testing of microlens arrays for sensors and microsystems

@inproceedings{Nussbaum1997DesignF,
  title={Design , fabrication and testing of microlens arrays for sensors and microsystems},
  author={P E Nussbaum and Reinhard Voelkel and Hans Peter Herzig and Martin G. Eisner},
  year={1997}
}
We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems ( μTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented. 
Highly Cited
This paper has 137 citations. REVIEW CITATIONS

Citations

Publications citing this paper.
Showing 1-10 of 67 extracted citations

A Microlens Reactive Ion Etching Process Study on CMOS Image Sensor - Wen-Hao Lo

2018 e-Manufacturing & Design Collaboration Symposium (eMDC) • 2018
View 1 Excerpt

Design of Micro Photon Sieve Arrays for High Resolution Light-field Capture in Plenoptic Cameras

2018 - 3DTV-Conference: The True Vision - Capture, Transmission and Display of 3D Video (3DTV-CON) • 2018
View 1 Excerpt

Monolithic Microlens VCSELs With High Beam Quality

IEEE Photonics Journal • 2017
View 2 Excerpts

PDMS Microlenses for Optical Biopsy Microsystems

IEEE Transactions on Industrial Electronics • 2017
View 2 Excerpts

138 Citations

01020'98'03'09'15
Citations per Year
Semantic Scholar estimates that this publication has 138 citations based on the available data.

See our FAQ for additional information.

References

Publications referenced by this paper.
Showing 1-10 of 38 references

Microlens lithography and smart masks MNE’96 (Glasgow

R Völkel, H PHerzig, +4 authors W BHugle
Microelectronic Engineering • 1997
View 1 Excerpt

Microlens lithography and smart masks MNE ’

R Völkel, P HerzigH, +4 authors B HugleW
1997

P (ed) 1997Micro-optics (London: Taylor and Francis

H Herzig
1997
View 1 Excerpt

Rigorous diffraction theory applied to microlens arrays EOS Topical Meeting on Diffractive

P Blattner, H PHerzig
Opitcs (Savonlinna, • 1997
View 1 Excerpt

Microlens array imaging system for photolithographyOpt

R Völkel, H PHerzig, Ph Nussbaum, R D ändliker
1996

Optische Detektionsvorrichtung f̈ ur chemische Analysen an kleinvolumigen Proben European patent application

A EBruno, St Barnard, +3 authors H PHerzig
1996
View 1 Excerpt

Thermal and mechanical analysis of photoresist and silylated photoresist films : application to AZ 5214

M MoreauW
Microelectron . Eng . • 1996

Thermal and mechanical analysis of photoresist and silylated photoresist films: application to AZ 5214 Microelectron

E Gogolides, E Tegou, K Beltsios, K Papadokostaki, M Hatzakis
1996
View 1 Excerpt

Townsen d W P and Feldblu m A Y 1996Technical Digest of the Topical Meeting on Diffractive Optics and Micro-Optic

K Mersereau, C RNijander
1996

Similar Papers

Loading similar papers…