Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor

Abstract

With growing developments in biomedical research and micro industrial applications, there is a demand for micro-grippers that are reliable and can operate with high precision. This paper presents a MEMS micro-gripper with an integrated electrothermal force sensors. The microgripper is actuated by electrostatic comb-drives. Electrothermal resistive sensors… (More)
DOI: 10.1109/AIM.2013.6584116

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