Design, fabrication and characterization of an integrated micro heat pipe

@article{Lee2002DesignFA,
  title={Design, fabrication and characterization of an integrated micro heat pipe},
  author={Man Chiu Lee and Man Wong and Yitshak Zohar},
  journal={Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)},
  year={2002},
  pages={85-88}
}
The design, fabrication and characterization of an integrated microsystem consisting of micro heat pipes, a micro heater, temperature and capacitive microsensors are presented. CMOS-compatible micromachining techniques are utilized to fabricate the micro heat pipe device capped by a nitride layer. In order to allow clear visualization of flow patterns during operation, the process has been modified using a glass wafer to cap the heat pipes. Temperature distributions along the micro heat pipes… CONTINUE READING

References

Publications referenced by this paper.
SHOWING 1-7 OF 7 REFERENCES

Proceedings of IS3M

  • K. Tang, Y. Zohar, M. Wong
  • Hong Kong. A1-3
  • 2000
1 Excerpt

T

  • B. Badran, F. M. Gerner, P. Ramadas
  • Henderson & K. W. Baker, Experimental Heat…
  • 1997
1 Excerpt

JMEMS

  • A. K. Mallik, G. P. Peterson, M. H. Weichold
  • vol.4, pp. 119-131
  • 1995
1 Excerpt

vol

  • G. P. Peterson, A. K. Mallik, J. Electronic Packaging
  • 117, pp. 82-87
  • 1995

vol

  • A. B. Duncan, G. P. Peterson, J. Thermophysics
  • 9, no. 2, pp. 365-367
  • 1994
2 Excerpts

A

  • G. P. Peterson
  • B. Duncan & M. H. Weichold, J. Heat Transfer, vol…
  • 1993
1 Excerpt

Int

  • J.J.M. Ceraets, J. C. Borst
  • J. Multiphase Flow, vol. 14, pp. 305-320
  • 1988
1 Excerpt

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