Design, fabrication and characterization of miniature RF MEMS switched capacitor based phase shifter

  title={Design, fabrication and characterization of miniature RF MEMS switched capacitor based phase shifter},
  author={Amrita Chakraborty and Bhaskar Gupta and Binay Kumar Sarkar},
  journal={Microelectronics Journal},
This paper aims to present in detail the design, fabrication and the various characterization techniques adopted in realizing a novel miniature-size switched capacitor based phase shifter. The work strives to provide an all-round development of a DMTL (Distributed MEMS Transmission Line) based phase shifting unit yielding an overall phase shift of 151 at a frequency of 15 GHz. The RF MEMS (Radio Frequency Micro Electro Mechanical Systems) Switched Capacitor based phase shifter has highly… CONTINUE READING
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