Design, Modeling and Simulation of a Closed-Loop Controller for a Dual Backplate MEMS Capacitive Microphone

Abstract

This work reports the design, modeling and simulation of an all electrostatic, analog closed-loop controller for a dual backplate MEMS capacitive microphone. In this work, a Simulink model which incorporates the key dynamics of the sensor, interface circuit, and sense and feedback non-linearities has been developed. Sinusoidal and step response of the open… (More)

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