Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings

Abstract

We report the design, fabrication, and characterization of a rotary micromotor supported on microball bearings. This is the first demonstration of a rotary micromachine with a robust mechanical support provided by microball-bearing technology. A six-phase bottom-drive variable-capacitance micromotor (Phi = 14 mm) is designed and simulated using the finite… (More)

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