Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials

@article{Trigona2014DesignFA,
  title={Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials},
  author={Carlo Trigona and Bruno Ando and Salvatore Baglio},
  journal={IEEE Transactions on Instrumentation and Measurement},
  year={2014},
  volume={63},
  pages={702-710}
}
This paper reports the numerical and experimental investigation of a bulk and etch silicon on insulator optoelectro-mechanical system realized using a multilayer metal-dielectric photonic bandgap (PBG) structure. A specific optical structure is designed, which embeds an air gap; the acceleration to be measured induces displacements into a proof mass that in turn are transduced as variations in the optical reflectance spectrum of the PBG stack. The PBG optical stack is made of metals and… CONTINUE READING

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