Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials

  title={Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials},
  author={Carlo Trigona and Bruno Ando and Salvatore Baglio},
  journal={IEEE Transactions on Instrumentation and Measurement},
This paper reports the numerical and experimental investigation of a bulk and etch silicon on insulator optoelectro-mechanical system realized using a multilayer metal-dielectric photonic bandgap (PBG) structure. A specific optical structure is designed, which embeds an air gap; the acceleration to be measured induces displacements into a proof mass that in turn are transduced as variations in the optical reflectance spectrum of the PBG stack. The PBG optical stack is made of metals and… CONTINUE READING


Publications referenced by this paper.
Showing 1-10 of 24 references

A numerical approach for modeling squeeze-film damping in rigid microstructures including rarefaction effects

S. Nigro, L. Pagnotta, M. F. Pantano
Proc. IMMURO, 2012, pp. 37–42. • 2012
View 2 Excerpts

Design, fabrication, and characterization of BESOI-accelerometer based on photonic band gap effect

2012 IEEE International Instrumentation and Measurement Technology Conference Proceedings • 2012

A MOEMS accelerometer based on photoelastic effect

D. Tang, D. Zhao, +3 authors F. Guo
Opt. Int. J. Light Electron Opt., vol. 122, no. 7, pp. 635–638, Apr. 2011. • 2011
View 1 Excerpt

Investigation on Cavity Based Bandpass Filter Using 2D Photonic Crystal

2011 International Conference on Devices and Communications (ICDeCom) • 2011
View 1 Excerpt

Omnidirectional mirror for visible light based on one-dimensional photonic crystal

H. Guan, P. Han, +3 authors W. Zhang
Chin. Opt. Lett., vol. 9, no. 7, p. 071603, Jul. 2011. • 2011
View 1 Excerpt

In-plane silicon-on-insulator optical MEMS accelerometer using waveguide fabry-perot microcavity with silicon/air bragg mirrors

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) • 2010

New methodology for in-situ residual stress measurement in MEMS structures

M. Sebastiani, E. Bemporad, G. Melone, L. Rizzi, A. M. Korsunsky
Proc. 11th Int. Workshop Stress-Induced Phenomena Metallization, Apr. 2010, pp. 120–126. • 2010
View 1 Excerpt

Similar Papers

Loading similar papers…