Deposition apparatus and deposition method using the same

@inproceedings{2006DepositionAA,
  title={Deposition apparatus and deposition method using the same},
  author={박창모 and 이주현 and 정진구},
  year={2006}
}
A deposition apparatus and a deposition method using the same are provided to protect a deposition source by transferring the deposition source to a safe place when a deposition chamber is opened and the deposition source is exposed to the outside. A deposition apparatus(100) includes a first body, a second body, an open and close unit(130), a deposition source transfer unit and a driving unit(150). The first body includes a deposition source inlet(111), and a gas outlet(112) and forms a first… CONTINUE READING