Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates

@inproceedings{Ramachandran2006DepositionAP,
  title={Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates},
  author={Sunder Ramachandran and Li Tao and Tack Ho Lee and Saurabh Sant and Lawrence J. Overzet and Matthew J. Goeckner and Min Ju Kim and Gil Sung Lee and W. Hua},
  year={2006}
}
In this work, antiwear nanoimprint templates were made by depositing and patterning diamondlike carbon DLC films on Si and quartz. A capacitively coupled plasma enhanced chemical vapor deposition PECVD system was configured to deposit 100 nm–1 m thick DLC films on Si and quartz substrates. These films were characterized with Raman spectroscopy, electron… CONTINUE READING