Dependence of finFET RF performance on fin width


This work analyzes the radio frequency (RF) performance of 60-nm gate length finFETs, for which the DC behavior exhibits reduced SCE. The RF analysis is carried out as a function of the gate length as well as the fin width (W<sub>fin</sub>). Cut off frequencies (f<sub>t</sub>, f <sub>max</sub>) on the order of 100 GHz are reported for the first time. It is… (More)


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