Demonstration of an electronic photonic integrated circuit in a commercial scaled bulk CMOS process

@article{Orcutt2008DemonstrationOA,
  title={Demonstration of an electronic photonic integrated circuit in a commercial scaled bulk CMOS process},
  author={J. S. Orcutt and Anatol Khilo and M. Popovi{\vc} and C. W. Holzwarth and Ben Moss and Hanqing Li and M. S. Dahlem and Thomas D. Bonifield and F. Kartner and E. R. Ippen and J. L. Hoyt and R. J. Ram and Vladimir Stojanovi{\'c}},
  journal={2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science},
  year={2008},
  pages={1-2}
}
We demonstrate the first photonic chip designed in a commercial bulk CMOS process (65 nm node) using standard process layers combined with scalable post-processing, enabling dense photonic integration with high-performance microprocessor electronics. 

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