Demonstration of a waveguide lens monolithically integrated with a laser diode by compositional disordering of a quantum well

Abstract

An elliptic waveguide lens that is monolithically integrated with a GaAs/AlGaAs distributed feedback laser diode and a grating output coupler by electron beam lithography, ion implantation, and two-step metalorganic vapor phase epitaxy is described. The waveguide lens is formed by the etching of a patterning layer to ensure that the fabrication process of… (More)

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Cite this paper

@article{Hirata1993DemonstrationOA, title={Demonstration of a waveguide lens monolithically integrated with a laser diode by compositional disordering of a quantum well}, author={T. Hirata and Mayu Suehiro and Masahiko Hihara and Makoto Dobashi and H. Hosomatsu}, journal={IEEE Photonics Technology Letters}, year={1993}, volume={5}, pages={698-700} }