Demonstration of Integrated Micro-Electro-Mechanical Relay Circuits for VLSI Applications

  title={Demonstration of Integrated Micro-Electro-Mechanical Relay Circuits for VLSI Applications},
  author={Hossein Fariborzi},
  journal={IEEE Journal of Solid-State Circuits},
This work presents measured results from test chips containing circuits implemented with micro-electro-mechanical (MEM) relays. The relay circuits designed on these test chips illustrate a range of important functions necessary for the implementation of integrated VLSI systems and lend insight into circuit design techniques optimized for the physical properties of these devices. To explore these techniques a hybrid electro-mechanical model of the relays' electrical and mechanical… CONTINUE READING
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